Eric Garfunkel

Research output

Research output per year 1979 1994 1996 1997 1999 2001 2002 2003 2004 2005 2006 2007 2010 2013 2014 2016 2018 2024

• 171 Article
• 17 Conference contribution
• 5 Conference article
• 5 Review article
• 9 More
  • 2 Paper
  • 2 Comment/debate
  • 1 Chapter
  • 1 Foreword/postscript
  • 1 Letter
  • 1 Short survey
  • 1 Innovation

Research output per year

Research output per year

Search results

• 2017

  High Resolution, Real-Time Flatness and Thermal Expansion Metrology

  Ermakov, A. (Inventor), Li, X. (Inventor), Garfunkel, E. (Inventor), Feldman, L. (Inventor) & Gustafsson, T. (Inventor), May 2017

  Research output: Innovation

  • Thermal Expansion 100%
  • Thin Films 40%
  • Parallel Beam 33%
  • Flatness Measurement 33%
  • Vibration Measurement 33%