• 3692 Citations
  • 30 h-Index
1975 …2018
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Fingerprint Dive into the research topics where George Celler is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

Silicon Chemical Compounds
silicon Physics & Astronomy
insulators Physics & Astronomy
Substrates Engineering & Materials Science
lasers Physics & Astronomy
Annealing Engineering & Materials Science
annealing Physics & Astronomy
wafers Physics & Astronomy

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Research Output 1975 2018

3 Citations (Scopus)

Ultrahigh sensitivity SIMS analysis of oxygen in silicon

Jakiela, R., Barcz, A., Sarnecki, J. & Celler, G., Jul 1 2018, In : Surface and Interface Analysis. 50, 7, p. 729-733 5 p.

Research output: Contribution to journalArticle

Silicon
Secondary ion mass spectrometry
secondary ion mass spectrometry
Pumps
Oxygen
1 Citation (Scopus)

Incorporation of oxygen in SiC implanted with hydrogen

Barcz, A., Jakieła, R., Kozubal, M., Dyczewski, J. & Celler, G., Dec 15 2015, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 365, p. 146-149 4 p.

Research output: Contribution to journalArticle

implantation
Hydrogen
Oxygen
oxygen
hydrogen
9 Citations (Scopus)

Diffusion and impurity segregation in hydrogen-implanted silicon carbide

Barcz, A., Kozubal, M., Jakieła, R., Ratajczak, J., Dyczewski, J., Gołaszewska, K., Wojciechowski, T. & Celler, G. K., Jun 14 2014, In : Journal of Applied Physics. 115, 22, 223710.

Research output: Contribution to journalArticle

silicon carbides
secondary ion mass spectrometry
impurities
implantation
oxygen
2 Citations (Scopus)

Heteroepitaxial growth on thin sheets and bulk material: Exploring differences in strain relaxation via low-energy electron microscopy

Euaruksakul, C., Kelly, M. M., Yang, B., Savage, D. E., Celler, G. & Lagally, M. G., Jan 15 2014, In : Journal of Physics D: Applied Physics. 47, 2, 025305.

Research output: Contribution to journalArticle

Strain relaxation
Epitaxial growth
Electron microscopy
electron microscopy
Oxides
10 Citations (Scopus)

Lithography and doping in strained Si towards atomically precise device fabrication

Lee, W. C. T., McKibbin, S. R., Thompson, D. L., Xue, K., Scappucci, G., Bishop, N., Celler, G. K., Carroll, M. S. & Simmons, M. Y., Apr 11 2014, In : Nanotechnology. 25, 14, 145302.

Research output: Contribution to journalArticle

Silicon
Lithography
Doping (additives)
Fabrication
Hydrogen