Numerical and Parametric Modeling of Piezoelectric Thin-Film Resonators

9412644 Yong This research will support an Engineering Faculty Internship under the GOALI program at the Corporate Research Laboratories of Motorola, Inc. The primary objective of the research is to advance the state of the art knowledge in designing and fabricating piezoelectric thin film resonators. The project will complement an on-going experimental research program on thin film devices at the Phoenix Corporate Research Laboratories of Motorola, Inc. The principal investigator at Motorola, Inc. is Mr. Luke Mang. The proposed work will be performed in two phases: (I) research and development of finite element programs for piezoelectric thin film resonators, and (II) parametric study of thin film resonators using the results of experimental research at Motorola, Inc. and the numerical models developed in phase I. The impact of the proposed work is a better analysis/design tool for piezoelectric thin film resonators. ***