A Compact UHV rotary Feedthrough

Stephen H. Garofalini

doi:10.1116/1.572633

A Compact UHV rotary Feedthrough

Stephen H. Garofalini

School of Engineering, Materials Science & Engineering

Research output: Contribution to journal › Comment/debate › peer-review

3 Scopus citations

Original language	English (US)
Pages (from-to)	79-81
Number of pages	3
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	2
Issue number	1
DOIs	https://doi.org/10.1116/1.572633
State	Published - Jan 1984

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1116/1.572633

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A Compact UHV rotary Feedthrough

All Science Journal Classification (ASJC) codes

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