A Compact UHV rotary Feedthrough

Research output: Contribution to journalComment/debatepeer-review

2 Scopus citations
Original languageEnglish (US)
Pages (from-to)79-81
Number of pages3
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume2
Issue number1
DOIs
StatePublished - Jan 1984

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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