Keyphrases
Adverse Effects
25%
Application in Industry
25%
Atomic Force Microscope
50%
Atomic Force Microscope Imaging
100%
Cantilever Probe
25%
Control Approach
100%
Control Input
25%
Control Method
25%
Coupling Effect
100%
Cross-axis Coupling
50%
Cross-coupling
25%
Cross-coupling Compensation
100%
Feedback Control
50%
Hard Disk Drive
25%
High-resolution Scanning
25%
Iterative Control
50%
Microscope Application
25%
Mode Imaging
50%
Nanoasperity
25%
Nanopositioning
25%
Piezoelectric Tube Scanner
50%
Piezotube
100%
Pole Tip
25%
Position Error
25%
Rate-2
25%
Tapping Mode
100%
Three-dimensional (3D)
25%
Engineering
Atomic Force Microscope
100%
Control Input
25%
Coupling Effect
100%
Cross-Coupling
100%
Experimental Result
25%
Feedback Control
25%
Feedforward Control
25%
Hard Disk Drive
25%
Piezoelectric
50%
Position Error
25%
Scan Rate
25%
Tapping Mode
100%