A marker technique to identify diffusing elements during initial reactions using ion scattering spectroscopy

Michael T. Schmidt, Zhen Wu, Richard M. Osgood

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

A variation of classical marker techniques has been combined with low‐energy ion scattering spectroscopy (ISS) to study the diffusion of species during the initial formation of several reachted monolayers, allowing the study of thinner layers than standard marker techniques allow. Results are presented for the reaction of oxygen with GaAs under 248 nm laser illumination and at 400 °C, as well as for the well‐studied case of Ni oxidation at room information that can be obtained with his method. The results show that inward oxygen diffusion can be distinguished from outward metal diffusion as the reaction proceeds. This information is crucial for developing an understanding of reaction mechanisms in thin films.

Original languageEnglish (US)
Pages (from-to)43-47
Number of pages5
JournalSurface and Interface Analysis
Volume17
Issue number1
DOIs
StatePublished - Jan 1991

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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