A MEMS-based quartz resonator technology for GHz applications

Frederic P. Stratton, David T. Chang, Deborah J. Kirby, Richard J. Joyce, Tsung Yuan Hsu, Randall L. Kubena, Yook Kong Yong

Research output: Contribution to conferencePaperpeer-review

33 Scopus citations

Abstract

We report on the development of a new MEMS quartz resonator technology that allows for the processing and integration of VHF to UHF high-Q oscillators and filters with high-speed silicon or III-V electronics. This paper describes the successful demonstration of new wafer bonding and dry plasma etching processes that make quartz-MEMS technology possible. We present impedance, Q, and temperature sensitivity data along with comparison to 3-D harmonic and thermal analysis of VHF-UHF resonators. We also show Coventor simulation data of our first two- and three-pole monolithic crystal filter designs as well as a filter array layout which shall facilitate integration with front-end RF electronics and switches. Finally, we demonstrate a mechanical tuning technique for our resonators utilizing focusedion-beam (FIB) technology.

Original languageEnglish (US)
Pages27-34
Number of pages8
StatePublished - 2005
Event2004 IEEE International Frequency Control Symposium and Exposition. A Conference of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society (UFFC-S) - Montreal, Canada
Duration: Aug 23 2004Aug 27 2004

Other

Other2004 IEEE International Frequency Control Symposium and Exposition. A Conference of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society (UFFC-S)
Country/TerritoryCanada
CityMontreal
Period8/23/048/27/04

All Science Journal Classification (ASJC) codes

  • General Engineering

Fingerprint

Dive into the research topics of 'A MEMS-based quartz resonator technology for GHz applications'. Together they form a unique fingerprint.

Cite this