A novel AFM/STM/SEM system

A. V. Ermakov, E. L. Garfunkel

Research output: Contribution to journalArticlepeer-review

40 Scopus citations


An atomic force/scanning tunneling (AFM/STM) microscope intended for operation inside a scanning electron microscope (SEM) is described. This AFM/STM/SEM system enables us to image a sample conventionally by SEM as well as to investigate the local surface topography by AFM or STM. This device incorporates a new method for monitoring AFM cantilever deflection that utilizes the focused electron beam of the SEM.

Original languageEnglish (US)
Pages (from-to)2853-2854
Number of pages2
JournalReview of Scientific Instruments
Issue number9
StatePublished - 1994

All Science Journal Classification (ASJC) codes

  • Instrumentation


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