A novel AFM/STM/SEM system

A. V. Ermakov; E. L. Garfunkel

doi:10.1063/1.1144627

A novel AFM/STM/SEM system

A. V. Ermakov, E. L. Garfunkel

Rutgers Global

Research output: Contribution to journal › Article › peer-review

40 Scopus citations

Abstract

An atomic force/scanning tunneling (AFM/STM) microscope intended for operation inside a scanning electron microscope (SEM) is described. This AFM/STM/SEM system enables us to image a sample conventionally by SEM as well as to investigate the local surface topography by AFM or STM. This device incorporates a new method for monitoring AFM cantilever deflection that utilizes the focused electron beam of the SEM.

Original language	English (US)
Pages (from-to)	2853-2854
Number of pages	2
Journal	Review of Scientific Instruments
Volume	65
Issue number	9
DOIs	https://doi.org/10.1063/1.1144627
State	Published - 1994

All Science Journal Classification (ASJC) codes

Instrumentation

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10.1063/1.1144627

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@article{b7b6ba2fc72846079f1f9a9ed2118219,

title = "A novel AFM/STM/SEM system",

abstract = "An atomic force/scanning tunneling (AFM/STM) microscope intended for operation inside a scanning electron microscope (SEM) is described. This AFM/STM/SEM system enables us to image a sample conventionally by SEM as well as to investigate the local surface topography by AFM or STM. This device incorporates a new method for monitoring AFM cantilever deflection that utilizes the focused electron beam of the SEM.",

author = "Ermakov, {A. V.} and Garfunkel, {E. L.}",

year = "1994",

doi = "10.1063/1.1144627",

language = "English (US)",

volume = "65",

pages = "2853--2854",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics Publising LLC",

number = "9",

}

TY - JOUR

T1 - A novel AFM/STM/SEM system

AU - Ermakov, A. V.

AU - Garfunkel, E. L.

PY - 1994

Y1 - 1994

N2 - An atomic force/scanning tunneling (AFM/STM) microscope intended for operation inside a scanning electron microscope (SEM) is described. This AFM/STM/SEM system enables us to image a sample conventionally by SEM as well as to investigate the local surface topography by AFM or STM. This device incorporates a new method for monitoring AFM cantilever deflection that utilizes the focused electron beam of the SEM.

AB - An atomic force/scanning tunneling (AFM/STM) microscope intended for operation inside a scanning electron microscope (SEM) is described. This AFM/STM/SEM system enables us to image a sample conventionally by SEM as well as to investigate the local surface topography by AFM or STM. This device incorporates a new method for monitoring AFM cantilever deflection that utilizes the focused electron beam of the SEM.

UR - http://www.scopus.com/inward/record.url?scp=0013119606&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0013119606&partnerID=8YFLogxK

U2 - 10.1063/1.1144627

DO - 10.1063/1.1144627

M3 - Article

AN - SCOPUS:0013119606

SN - 0034-6748

VL - 65

SP - 2853

EP - 2854

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 9

ER -

A novel AFM/STM/SEM system

Abstract

All Science Journal Classification (ASJC) codes

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