A Novel Deposit/Spin Waveguide Interconnection (DSWI) for Semiconductor Integrated Optics

Kazuhito Furuya, Barry I. Miller, Larry A. Coldren, Richard E. Howard

Research output: Contribution to journalArticlepeer-review

10 Scopus citations


We propose an efficient and simple optical interconnection between active semiconductor components by deposition and spin coating. Details of the waveguide design, the fabrication technique, and a promising material combination are given. Experimental results with an integrated laser-polyimide/SiO[formula omitted] waveguide combination demonstrate low-threshold (2.0 kA/cm2) laser operation and a low-loss waveguide interconnection (81 percent coupling efficiency) on a GaInAsP/InP chip.

Original languageEnglish (US)
Pages (from-to)1783-1789
Number of pages7
JournalIEEE Journal of Quantum Electronics
Issue number10
StatePublished - Oct 1982
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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