A Novel Deposit/Spin Waveguide Interconnection (DSWI) for Semiconductor Integrated Optics

Kazuhito Furuya, Barry I. Miller, Larry A. Coldren, Richard E. Howard

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

We propose an efficient and simple optical interconnection between active semiconductor components by deposition and spin coating. Details of the waveguide design, the fabrication technique, and a promising material combination are given. Experimental results with an integrated laser-polyimide/SiO[formula omitted] waveguide combination demonstrate low-threshold (2.0 kA/cm2) laser operation and a low-loss waveguide interconnection (81 percent coupling efficiency) on a GaInAsP/InP chip.

Original languageEnglish (US)
Pages (from-to)1783-1789
Number of pages7
JournalIEEE Journal of Quantum Electronics
Volume18
Issue number10
DOIs
StatePublished - Oct 1982
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'A Novel Deposit/Spin Waveguide Interconnection (DSWI) for Semiconductor Integrated Optics'. Together they form a unique fingerprint.

Cite this