Abstract
We propose an efficient and simple optical interconnection between active semiconductor components by deposition and spin coating. Details of the waveguide design, the fabrication technique, and a promising material combination are given. Experimental results with an integrated laser-polyimide/SiOx (x ~ 2) waveguide combination demonstrate low-threshold (2.0 kA/cm2) laser operation and a low-loss waveguide interconnection (81 percent coupling efficiency) on a GaInAsP/InP chip.
Original language | English (US) |
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Pages (from-to) | 1771-1777 |
Number of pages | 7 |
Journal | IEEE Transactions on Microwave Theory and Techniques |
Volume | 30 |
Issue number | 10 |
DOIs | |
State | Published - Oct 1982 |
Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Radiation
- Condensed Matter Physics
- Electrical and Electronic Engineering