A refractory lift-off process with applications to high-Tc superconducting circuits

R. E. Howard

doi:10.1063/1.90258

A refractory lift-off process with applications to high-T_c superconducting circuits

R. E. Howard

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

A refractory stencil lift-off process utilizing Nb/Cu bilayers is described that is suitable for materials, such as the high-transition-temperature superconductors, which must be deposited on hot (up to 1000°C) substrates.

Original language	English (US)
Pages (from-to)	1034-1035
Number of pages	2
Journal	Applied Physics Letters
Volume	33
Issue number	12
DOIs	https://doi.org/10.1063/1.90258
State	Published - 1978
Externally published	Yes

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.90258

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@article{ca5aeed0b0934adba27a0384cf3e8c74,

title = "A refractory lift-off process with applications to high-Tc superconducting circuits",

abstract = "A refractory stencil lift-off process utilizing Nb/Cu bilayers is described that is suitable for materials, such as the high-transition-temperature superconductors, which must be deposited on hot (up to 1000°C) substrates.",

author = "Howard, {R. E.}",

year = "1978",

doi = "10.1063/1.90258",

language = "English (US)",

volume = "33",

pages = "1034--1035",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "12",

}

TY - JOUR

T1 - A refractory lift-off process with applications to high-Tc superconducting circuits

AU - Howard, R. E.

PY - 1978

Y1 - 1978

N2 - A refractory stencil lift-off process utilizing Nb/Cu bilayers is described that is suitable for materials, such as the high-transition-temperature superconductors, which must be deposited on hot (up to 1000°C) substrates.

AB - A refractory stencil lift-off process utilizing Nb/Cu bilayers is described that is suitable for materials, such as the high-transition-temperature superconductors, which must be deposited on hot (up to 1000°C) substrates.

UR - http://www.scopus.com/inward/record.url?scp=0009408011&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0009408011&partnerID=8YFLogxK

U2 - 10.1063/1.90258

DO - 10.1063/1.90258

M3 - Article

AN - SCOPUS:0009408011

SN - 0003-6951

VL - 33

SP - 1034

EP - 1035

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 12

ER -

A refractory lift-off process with applications to high-T_c superconducting circuits

Abstract

All Science Journal Classification (ASJC) codes

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