Aberration correction results in the IBM STEM instrument

Research output: Contribution to journalArticle

26 Scopus citations

Abstract

Results from the installation of aberration correction in the IBM 120kV STEM argue that a sub-angstrom probe size has been achieved. Results and the experimental methods used to obtain them are described here. Some post-experiment processing is necessary to demonstrate the probe size of about 0.078nm. While the promise of aberration correction is demonstrated, we remain at the very threshold of practicality, given the very stringent stability requirements.

Original languageEnglish (US)
Pages (from-to)239-249
Number of pages11
JournalUltramicroscopy
Volume96
Issue number3-4
DOIs
StatePublished - Jan 1 2003
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

Keywords

  • Aberration correction
  • Electron microscopy
  • Quadrupole-octupole corrector
  • Scanning transmission electron microscopy

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