Active control of acoustics-caused nano-vibration in atomic force microscope imaging

Sicheng Yi, Tianwei Li, Qingze Zou

Research output: Contribution to journalArticle

Abstract

In this paper, we propose a finite-impulse-response (FIR)-based feedforward control approach to mitigate the acoustic-caused probe vibration during atomic force microscope (AFM) imaging. Compensation for the acoustic-caused probe vibration is important, as environmental disturbances including acoustic noise induce nano-scale probe vibration, directly affecting the AFM performance in applications such as imaging, nanomechanical characterization, and nanomanipulation. Although conventional passive noise cancellation apparatus has been employed, limitation exists, and residual noise still persists. Thus, a FIR-based active feedforward control approach is developed, by exploring a data-driven approach to account for the vibrational dynamics of the probe caused by the environmental acoustic noise in the controller design. An experimental implementation in AFM imaging application is presented and discussed to illustrate the proposed technique. Experimental results show that the FIR-based feedforward control is promising to not only complement, but also alleviate the limitations of passive noise control in AFM operations.

Original languageEnglish (US)
Pages (from-to)101-110
Number of pages10
JournalUltramicroscopy
Volume195
DOIs
StatePublished - Dec 1 2018

Fingerprint

active control
Vibrations (mechanical)
Feedforward control
feedforward control
Microscopes
Acoustics
Impulse response
microscopes
Imaging techniques
vibration
acoustics
impulses
Acoustic noise
probes
Acoustic variables control
cancellation
complement
controllers
disturbances
Controllers

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

Cite this

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abstract = "In this paper, we propose a finite-impulse-response (FIR)-based feedforward control approach to mitigate the acoustic-caused probe vibration during atomic force microscope (AFM) imaging. Compensation for the acoustic-caused probe vibration is important, as environmental disturbances including acoustic noise induce nano-scale probe vibration, directly affecting the AFM performance in applications such as imaging, nanomechanical characterization, and nanomanipulation. Although conventional passive noise cancellation apparatus has been employed, limitation exists, and residual noise still persists. Thus, a FIR-based active feedforward control approach is developed, by exploring a data-driven approach to account for the vibrational dynamics of the probe caused by the environmental acoustic noise in the controller design. An experimental implementation in AFM imaging application is presented and discussed to illustrate the proposed technique. Experimental results show that the FIR-based feedforward control is promising to not only complement, but also alleviate the limitations of passive noise control in AFM operations.",
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Active control of acoustics-caused nano-vibration in atomic force microscope imaging. / Yi, Sicheng; Li, Tianwei; Zou, Qingze.

In: Ultramicroscopy, Vol. 195, 01.12.2018, p. 101-110.

Research output: Contribution to journalArticle

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