Advanced spatially resolved EELS in the STEM

Research output: Contribution to journalConference articlepeer-review

45 Scopus citations


Commercial availability of high spatial resolution STEM instruments is leading to widespread use of EELS and ADF imaging techniques. Future instruments will need to greatly improve levels of stability and accuracy to allow use of these techniques with atomic level precision. I review some experimental results which suggest an urgent need for a 0.1 nm diameter probe with a usable EELS spectral resolution of about 100 meV.

Original languageEnglish (US)
Pages (from-to)33-42
Number of pages10
Issue number1-4
StatePublished - Jun 1999
Externally publishedYes
EventProceedings of the 1998 International Workshop Towards Atomic Resolution Analysis, TARA '98 Part 1 : Techniques and Instrumentation - Port Ludlow, WA, USA
Duration: Sep 6 1998Sep 11 1998

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation


  • Atomic level analysis
  • EELS and ADF imaging techniques
  • STEM instruments


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