Advanced spatially resolved EELS in the STEM

P. E. Batson

doi:10.1016/S0304-3991(99)00026-1

Advanced spatially resolved EELS in the STEM

P. E. Batson

Research output: Contribution to journal › Conference article › peer-review

45 Scopus citations

Abstract

Commercial availability of high spatial resolution STEM instruments is leading to widespread use of EELS and ADF imaging techniques. Future instruments will need to greatly improve levels of stability and accuracy to allow use of these techniques with atomic level precision. I review some experimental results which suggest an urgent need for a 0.1 nm diameter probe with a usable EELS spectral resolution of about 100 meV.

Original language	English (US)
Pages (from-to)	33-42
Number of pages	10
Journal	Ultramicroscopy
Volume	78
Issue number	1-4
DOIs	https://doi.org/10.1016/S0304-3991(99)00026-1
State	Published - Jun 1999
Externally published	Yes
Event	Proceedings of the 1998 International Workshop Towards Atomic Resolution Analysis, TARA '98 Part 1 : Techniques and Instrumentation - Port Ludlow, WA, USA Duration: Sep 6 1998 → Sep 11 1998

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Instrumentation

Keywords

Atomic level analysis
EELS and ADF imaging techniques
STEM instruments

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10.1016/S0304-3991(99)00026-1

Cite this

@article{07d40682f3574cc6b94a098d50a96ab3,

title = "Advanced spatially resolved EELS in the STEM",

abstract = "Commercial availability of high spatial resolution STEM instruments is leading to widespread use of EELS and ADF imaging techniques. Future instruments will need to greatly improve levels of stability and accuracy to allow use of these techniques with atomic level precision. I review some experimental results which suggest an urgent need for a 0.1 nm diameter probe with a usable EELS spectral resolution of about 100 meV.",

keywords = "Atomic level analysis, EELS and ADF imaging techniques, STEM instruments",

author = "Batson, {P. E.}",

year = "1999",

month = jun,

doi = "10.1016/S0304-3991(99)00026-1",

language = "English (US)",

volume = "78",

pages = "33--42",

journal = "Ultramicroscopy",

issn = "0304-3991",

publisher = "Elsevier",

number = "1-4",

note = "Proceedings of the 1998 International Workshop Towards Atomic Resolution Analysis, TARA '98 Part 1 : Techniques and Instrumentation ; Conference date: 06-09-1998 Through 11-09-1998",

}

TY - JOUR

T1 - Advanced spatially resolved EELS in the STEM

AU - Batson, P. E.

PY - 1999/6

Y1 - 1999/6

N2 - Commercial availability of high spatial resolution STEM instruments is leading to widespread use of EELS and ADF imaging techniques. Future instruments will need to greatly improve levels of stability and accuracy to allow use of these techniques with atomic level precision. I review some experimental results which suggest an urgent need for a 0.1 nm diameter probe with a usable EELS spectral resolution of about 100 meV.

AB - Commercial availability of high spatial resolution STEM instruments is leading to widespread use of EELS and ADF imaging techniques. Future instruments will need to greatly improve levels of stability and accuracy to allow use of these techniques with atomic level precision. I review some experimental results which suggest an urgent need for a 0.1 nm diameter probe with a usable EELS spectral resolution of about 100 meV.

KW - Atomic level analysis

KW - EELS and ADF imaging techniques

KW - STEM instruments

UR - http://www.scopus.com/inward/record.url?scp=0033005628&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033005628&partnerID=8YFLogxK

U2 - 10.1016/S0304-3991(99)00026-1

DO - 10.1016/S0304-3991(99)00026-1

M3 - Conference article

AN - SCOPUS:0033005628

SN - 0304-3991

VL - 78

SP - 33

EP - 42

JO - Ultramicroscopy

JF - Ultramicroscopy

IS - 1-4

T2 - Proceedings of the 1998 International Workshop Towards Atomic Resolution Analysis, TARA '98 Part 1 : Techniques and Instrumentation

Y2 - 6 September 1998 through 11 September 1998

ER -

Advanced spatially resolved EELS in the STEM

Abstract

All Science Journal Classification (ASJC) codes

Keywords

Access to Document

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