An integrated approach to high-speed probe-based nanofabrication: SPM imaging

Yan Yan, Qingze Zou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this article, we propose an integrated approach to achieve high-speed nano-positioning for high-speed atomic force microscope (AFM) operations in applications such as probe-based nanofabrication. The development of AFM technology enabled the "bottom up" approach to design and create nanostructures and nanodevices. The throughput of the probe-based nanofabrication, however, is limited by the challenges in positioning the probe at high-speed. In AFM operations, nano-positioning of the probe in 3-D (both lateral x - y and vertical z axes) is needed. High-speed, large-size AFM operation is challenging because in high-speed lateral scanning of the AFM operation at large positioning range, large positioning error of the AFM probe relative to the sample can be generated due to the adverse effects - the nonlinear hysteresis and the linear vibrational dynamics of the piezotube actuator. In addition, vertical precision positioning of the AFM probe is even more challenging (than the lateral scanning) because the desired trajectory (i.e., the sample topography profile) is unknown in general, and the probe positioning is also effected by and sensitive to the probe-sample interaction. The main contribution of this article is the development of an integrated approach that combines advanced control algorithm with an advanced hardware platform. The proposed approach is demonstrated by implementing to AFM imaging of a large-size (50 μm) calibration sample at high-speed (50 Hz scan rate).

Original languageEnglish (US)
Title of host publication2008 Proceedings of the ASME - 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008
Pages693-702
Number of pages10
DOIs
StatePublished - 2008
Externally publishedYes
Event2008 ASME 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008 - Kowloon, Hong Kong
Duration: Jun 3 2008Jun 5 2008

Publication series

Name2008 Proceedings of the ASME - 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008

Other

Other2008 ASME 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008
CountryHong Kong
CityKowloon
Period6/3/086/5/08

All Science Journal Classification (ASJC) codes

  • Biotechnology
  • Electrical and Electronic Engineering

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