Analysis of high velocity pseudo-surface acoustic waves (HVPSAW) in quartz periodic structures with electrode fingers

Y. K. Yong, S. Kanna

Research output: Contribution to journalConference articlepeer-review

7 Scopus citations

Abstract

A finite element study of the piezoelectric Lagrangean equations for frequency-temperature behavior was performed for a two-dimensional periodic high velocity pseudo surface acoustic wave (HVPSAW) structure of quartz. Plane strain assumptions were used to enable a two-dimensional analysis of straight crested HVPSAW in the structure. The HVPSAW modes found on a partially metallized substrate surface has a symmetric electric potential field, therefore, the modes can be driven by the usual IDT array. The attenuation of the HVPSAW mode is strongly affected by both the electrode height and crystal cut angles. Strong HVPSAW modes with good frequency-temperature behavior can be obtained by a proper combination of electrode material, electrode height and the substrate cut angle. The HVPSAW mode is "leakier" than its PSAW counterpart.

Original languageEnglish (US)
Pages (from-to)301-306
Number of pages6
JournalProceedings of the Annual IEEE International Frequency Control Symposium
StatePublished - 2000
Event2000 IEEE 54th Annual Frequency Control Symposium - Kansas, MO, United States
Duration: Jun 7 2000Jun 9 2000

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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