Analysis of Pseudo-Surface Acoustic Waves (PSAW) in quartz periodic structures with electrode fingers

Yook Kong Yong, Shigeo Kanna

Research output: Contribution to journalConference articlepeer-review

3 Scopus citations

Abstract

A finite element study of the piezoelectric Lagrangian equations for frequency-temperature behavior was performed for a two-dimensional periodic PSAW structure of quartz. Plane strain assumptions were used to enable a two-dimensional analysis of straight crested pseudo surface acoustic waves in the structure. Two PSAW modes can exist on a partially metallized substrate surface; one has an anti symmetric electric potential field about the electrode center and the other has a symmetric field. The anti symmetric mode has a higher phase velocity and is less affected by the electrode mass. These two modes degenerate into one mode on a fully metallized surface or a free surface. The attenuation of the PSAW mode is strongly affected by both the electrode height and crystal cut angles. Strong PSAW modes with good frequency-temperature behavior can be obtained by a proper combination of electrode material, electrode height and the substrate cut angle.

Original languageEnglish (US)
Pages (from-to)147-150
Number of pages4
JournalProceedings of the IEEE Ultrasonics Symposium
Volume1
StatePublished - 1999
Event1999 IEEE Ultrasonics Symposium - Caesars Tahoe, NV, USA
Duration: Oct 17 1999Oct 20 1999

All Science Journal Classification (ASJC) codes

  • Acoustics and Ultrasonics

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