Atomic scale oxide superlattices grown by RHEED controlled pulsed laser deposition

T. M. shaw, A. Gupta, M. Y. Chern, Philip Batson, R. B. Laibowitz, B. A. Scott

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

By depositing thin films under conditions where intensity oscillations are observed in RHEED (reflection high-energy electron diffraction) spots, unit cell level multilayers of SrTiO3/BaTiO3 structures have been grown by pulsed laser ablation. High resolution TEM (transmission electron microscopy) and STEM (scanning transmission electron microscopy) observations of the deposits show that epitaxial multilayers with layer thicknesses of 1, 2, 4, 8, and 16 unit cells can be grown on [100] orientation SrTiO3 substrates. The superlattices show partial intermixing of the Sr and Ba for layer thicknesses less than 8 unit cells, but incomplete intermixing occurs even when the layers are only a single unit cell thick. From observations of the degree of intermixing at different depths in the deposit, it was determined that most of the intermixing takes place during deposition and not during subsequent annealing of the deposit. The 16 and 8 unit cell thick BaTiO3 layers were found to be tetragonal with the c-axis of the layers oriented normal to the substrate but with the a-axis strained to coherently match the SrTiO3 layers.

Original languageEnglish (US)
Pages (from-to)2566-2573
Number of pages8
JournalJournal of Materials Research
Volume9
Issue number10
DOIs
StatePublished - Jan 1 1994
Externally publishedYes

Fingerprint

Reflection high energy electron diffraction
Superlattices
Pulsed laser deposition
high energy electrons
Oxides
pulsed laser deposition
superlattices
Deposits
electron diffraction
oxides
Multilayers
cells
deposits
Laser ablation
Substrates
High resolution transmission electron microscopy
Pulsed lasers
Annealing
Transmission electron microscopy
Thin films

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

shaw, T. M. ; Gupta, A. ; Chern, M. Y. ; Batson, Philip ; Laibowitz, R. B. ; Scott, B. A. / Atomic scale oxide superlattices grown by RHEED controlled pulsed laser deposition. In: Journal of Materials Research. 1994 ; Vol. 9, No. 10. pp. 2566-2573.
@article{f7edf5690921475898e25b633e1080b4,
title = "Atomic scale oxide superlattices grown by RHEED controlled pulsed laser deposition",
abstract = "By depositing thin films under conditions where intensity oscillations are observed in RHEED (reflection high-energy electron diffraction) spots, unit cell level multilayers of SrTiO3/BaTiO3 structures have been grown by pulsed laser ablation. High resolution TEM (transmission electron microscopy) and STEM (scanning transmission electron microscopy) observations of the deposits show that epitaxial multilayers with layer thicknesses of 1, 2, 4, 8, and 16 unit cells can be grown on [100] orientation SrTiO3 substrates. The superlattices show partial intermixing of the Sr and Ba for layer thicknesses less than 8 unit cells, but incomplete intermixing occurs even when the layers are only a single unit cell thick. From observations of the degree of intermixing at different depths in the deposit, it was determined that most of the intermixing takes place during deposition and not during subsequent annealing of the deposit. The 16 and 8 unit cell thick BaTiO3 layers were found to be tetragonal with the c-axis of the layers oriented normal to the substrate but with the a-axis strained to coherently match the SrTiO3 layers.",
author = "shaw, {T. M.} and A. Gupta and Chern, {M. Y.} and Philip Batson and Laibowitz, {R. B.} and Scott, {B. A.}",
year = "1994",
month = "1",
day = "1",
doi = "10.1557/JMR.1994.2566",
language = "English (US)",
volume = "9",
pages = "2566--2573",
journal = "Journal of Materials Research",
issn = "0884-2914",
publisher = "Materials Research Society",
number = "10",

}

Atomic scale oxide superlattices grown by RHEED controlled pulsed laser deposition. / shaw, T. M.; Gupta, A.; Chern, M. Y.; Batson, Philip; Laibowitz, R. B.; Scott, B. A.

In: Journal of Materials Research, Vol. 9, No. 10, 01.01.1994, p. 2566-2573.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Atomic scale oxide superlattices grown by RHEED controlled pulsed laser deposition

AU - shaw, T. M.

AU - Gupta, A.

AU - Chern, M. Y.

AU - Batson, Philip

AU - Laibowitz, R. B.

AU - Scott, B. A.

PY - 1994/1/1

Y1 - 1994/1/1

N2 - By depositing thin films under conditions where intensity oscillations are observed in RHEED (reflection high-energy electron diffraction) spots, unit cell level multilayers of SrTiO3/BaTiO3 structures have been grown by pulsed laser ablation. High resolution TEM (transmission electron microscopy) and STEM (scanning transmission electron microscopy) observations of the deposits show that epitaxial multilayers with layer thicknesses of 1, 2, 4, 8, and 16 unit cells can be grown on [100] orientation SrTiO3 substrates. The superlattices show partial intermixing of the Sr and Ba for layer thicknesses less than 8 unit cells, but incomplete intermixing occurs even when the layers are only a single unit cell thick. From observations of the degree of intermixing at different depths in the deposit, it was determined that most of the intermixing takes place during deposition and not during subsequent annealing of the deposit. The 16 and 8 unit cell thick BaTiO3 layers were found to be tetragonal with the c-axis of the layers oriented normal to the substrate but with the a-axis strained to coherently match the SrTiO3 layers.

AB - By depositing thin films under conditions where intensity oscillations are observed in RHEED (reflection high-energy electron diffraction) spots, unit cell level multilayers of SrTiO3/BaTiO3 structures have been grown by pulsed laser ablation. High resolution TEM (transmission electron microscopy) and STEM (scanning transmission electron microscopy) observations of the deposits show that epitaxial multilayers with layer thicknesses of 1, 2, 4, 8, and 16 unit cells can be grown on [100] orientation SrTiO3 substrates. The superlattices show partial intermixing of the Sr and Ba for layer thicknesses less than 8 unit cells, but incomplete intermixing occurs even when the layers are only a single unit cell thick. From observations of the degree of intermixing at different depths in the deposit, it was determined that most of the intermixing takes place during deposition and not during subsequent annealing of the deposit. The 16 and 8 unit cell thick BaTiO3 layers were found to be tetragonal with the c-axis of the layers oriented normal to the substrate but with the a-axis strained to coherently match the SrTiO3 layers.

UR - http://www.scopus.com/inward/record.url?scp=0028516762&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0028516762&partnerID=8YFLogxK

U2 - 10.1557/JMR.1994.2566

DO - 10.1557/JMR.1994.2566

M3 - Article

VL - 9

SP - 2566

EP - 2573

JO - Journal of Materials Research

JF - Journal of Materials Research

SN - 0884-2914

IS - 10

ER -