Keyphrases
Trajectory Tracking
100%
Nanomanipulation
100%
Multi-axis
100%
B-spline
100%
Decomposition Approach
100%
Decomposition Method
37%
Input Elements
37%
Output Tracking
25%
Precision Tracking
25%
Preactuation
25%
Actuation Time
25%
Control Input
12%
Control Method
12%
Feedback Control
12%
Finite number
12%
Scanning Probe Microscope
12%
Quality Robustness
12%
Desired Trajectory
12%
Online Computation
12%
Non-minimum Phase System
12%
Stable Inversion
12%
Iterative Learning Control
12%
Dynamic Variation
12%
Speed Tracking
12%
Inversion Theory
12%
Engineering
Actuation
100%
Finite Number
25%
Phase System
25%
Feedback Control System
25%
Scanning Probe Microscope
25%
Control Input
25%
Iterative Learning Control
25%