Body-Biased Multiple-Gate Micro-Electro-Mechanical Relays

Zhixin A. Ye, Sergio F. Almeida, Urmita Sikder, Xiaoer Hu, Tsegereda K. Esatu, Kathy Le, Jaeseok Jeon, Tsu Jae King Liu

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


Micro-electro-mechanical relays with multiple gate electrodes (i.e., multiple input voltage signals), operated with a tunable body bias voltage, are investigated for more compact and energy-efficient implementation of digital logic circuits. Specifically, a relay design with three gate electrodes of equal area is demonstrated to be capable of performing different digital logic functions for the same input operating voltage ( {V} {textbf {DD}} ), by adjusting the body bias voltage. Since the lower limit for {V} {textbf {DD}} is equal to the switching hysteresis voltage ( {V} {textbf {H}} ), the magnitude of {V} {textbf {H}} is investigated for different combinations of transitioning input voltage signals. It is found that {V} {textbf {H}} is larger for fewer transitioning input voltage signals, i.e., reduced effective actuation area of the switching input voltage signal. This can set a practical upper limit for the number of independent gates in a single relay.

Original languageEnglish (US)
Article number9320553
Pages (from-to)402-405
Number of pages4
JournalIEEE Electron Device Letters
Issue number3
StatePublished - Mar 2021
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


  • MEMS
  • body-bias
  • multiple inputs
  • relay


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