Abstract
AlGaN based interdigital metal-semiconductor-metal (MSM) photodetectors with 14% Al have been successfully grown and fabricated on sapphire substrates. The devices exhibit large gains up to 106 at high bias voltages, but with very high dark currents, > 1 mA and very long detector responses, > 60 seconds. A negative temperature coefficient for the breakdown voltage was observed indicating that tunneling is occurring. However, at high bias voltages, avalanche breakdown also appears to be present since a constant breakdown field of 105 V/cm was obtained independent of MSM geometry. Avalanche breakdown is nucleated at the non-uniform field distribution at the edge of the MSM finger.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 221-226 |
| Number of pages | 6 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3287 |
| DOIs | |
| State | Published - 1998 |
| Event | Photodetectors: Materials and Devices III - San Jose, CA, United States Duration: Jan 28 1998 → Jan 30 1998 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
Keywords
- Avalanche breakdown
- III-Nitrides
- Tunneling
- UV Photodetector