The chemical composition and electrical properties were investigated for epitaxially crystallized (Ba05,Sr05)TiO3 films deposited on Pt/MgO and YBaz2Cu3O7-x(YBCO)/MgO substrates by the laser ablation technique. Rutherford backscattering spectroscopy (RBS) analysis shows that thin films on Pt/MgO have almost the same stoichiometric composition as the target material. Films deposited on Pt/MgO at 600t: exhibited a dielectric constant of 330 and a dissipation factor of 0.02 at 100 kHz frequency. Leakage current density of BST thin films on Pt/MgO was smaller than on YBCO/MgO. Their leakage current density is about 0.8 μ A/cm2 at an applied electric field of 0.15 MY/cm.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Control and Systems Engineering
- Ceramics and Composites
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry