Characterization of (ba0,5sr05)tio3 thin films by the laser ablation technique and their electrical properties with different electrodes

Soon Gil Yoon, Jaichan Lee, Ahmad Safari

Research output: Contribution to journalArticlepeer-review

25 Scopus citations

Abstract

The chemical composition and electrical properties were investigated for epitaxially crystallized (Ba05,Sr05)TiO3 films deposited on Pt/MgO and YBaz2Cu3O7-x(YBCO)/MgO substrates by the laser ablation technique. Rutherford backscattering spectroscopy (RBS) analysis shows that thin films on Pt/MgO have almost the same stoichiometric composition as the target material. Films deposited on Pt/MgO at 600t: exhibited a dielectric constant of 330 and a dissipation factor of 0.02 at 100 kHz frequency. Leakage current density of BST thin films on Pt/MgO was smaller than on YBCO/MgO. Their leakage current density is about 0.8 μ A/cm2 at an applied electric field of 0.15 MY/cm.

Original languageEnglish (US)
Pages (from-to)329-339
Number of pages11
JournalIntegrated Ferroelectrics
Volume7
Issue number1-4
DOIs
StatePublished - Feb 1995

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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