Characterizing probe performance in the aberration corrected STEM

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19 Scopus citations

Abstract

Sub-Ångstrom imaging using the 120 kV IBM STEM is now routine if the probe optics is carefully controlled and fully characterized. However, multislice simulation using at least a frozen phonon approximation is required to understand the Annular Dark Field image contrast. Analysis of silicon dumbbell structures in the [1 1 0] and [2 1 1] projections illustrate this finding. Using fast image acquisition, atomic movement appears ubiquitous under the electron beam, and may be useful to illuminate atomic level processes.

Original languageEnglish (US)
Pages (from-to)1104-1114
Number of pages11
JournalUltramicroscopy
Volume106
Issue number11-12 SPEC. ISS.
DOIs
StatePublished - Oct 2006
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

Keywords

  • Aberration correction
  • Quadrupole-octupole corrector
  • Scanning transmission electron microscopy

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