Chemical and structural investigation of high-resolution patterning with HafSOx

Richard P. Oleksak, Rose E. Ruther, Feixiang Luo, Kurtis C. Fairley, Shawn R. Decker, William F. Stickle, Darren W. Johnson, Eric L. Garfunkel, Gregory S. Herman, Douglas A. Keszler

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Material Science