Chemical and structural investigation of high-resolution patterning with HafSOx

Keyphrases

• Structural Investigation 100%
• Hydroxide 100%
• Electron Beam 100%
• Chemical Investigation 100%
• HafSOx 100%
• High-resolution Patterning 100%
• Processing Stages 50%
• Annealing 50%
• High-resolution Transmission Electron Microscopy (HRTEM) 50%
• Energy Dispersive X-ray Spectroscopy 50%
• Oxide Materials 50%
• Blanket 50%
• Hafnium 50%
• HfO2 50%
• Chemical Mapping 50%
• Line Pattern 50%
• Electron Microscopy Imaging 50%
• Cross-sectional Shape 50%
• Tetramethylammonium Hydroxide 50%
• Lithographic Patterning 50%
• Residual Materials 50%
• Variable Spacing 50%
• Sub-20 Nm 50%

Material Science

• Film 100%
• Energy-Dispersive X-Ray Spectroscopy 50%
• Oxide Compound 25%
• High-Resolution Transmission Electron Microscopy 25%
• Hafnium 25%