@inproceedings{e2d312aa38da4de3a8f4cf80ca6855aa,
title = "Co-integration of a quartz OCXO and Si MEMS inertial sensors for improved navigational accuracy",
abstract = "On-chip integration of quartz resonators with Si devices opens new opportunities for microsystem miniaturization and enhanced performance. In addition to integrating with electronics, the integration of piezoelectric quartz resonators with other sensors of different material composition is also possible. In this paper, we demonstrate that a VHF SC-cut quartz resonator can be integrated within a high-aspect-ratio Si disk gyro with on-chip heating for locally ovenizing both devices in the same wafer-level vacuum cavity. The SC-cut OCXO can be used to lock the frequency and temperature of the gyro to ≤ 2 ppb and ≤50 μΧ, respectively, for improved accuracy.",
keywords = "Quartz MEMS, SC-cut oscillators, Si MEMS, Si disk resonator gyro, frequency locking, wafer-level ovenization",
author = "Kubena, {R. L.} and Stratton, {F. P.} and Huang, {L. X.} and Joyce, {R. J.} and Kirby, {D. J.} and Chang, {D. T.} and Yong, {Y. K.}",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 70th IEEE International Frequency Control Symposium, IFCS 2016 ; Conference date: 09-05-2016 Through 12-05-2016",
year = "2016",
month = aug,
day = "16",
doi = "10.1109/FCS.2016.7563590",
language = "English (US)",
series = "2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings",
address = "United States",
}