Control of shape and material composition of solid-state nanopores

Meng Yue Wu; Ralph M.M. Smeets; Mathijs Zandbergen; Ulrike Ziese; Diego Krapf; Philip E. Batson; H. Dekker Nynke; Cees Dekker; Henny W. Zandbergen

doi:10.1021/nl803613s

Control of shape and material composition of solid-state nanopores

Meng Yue Wu, Ralph M.M. Smeets, Mathijs Zandbergen, Ulrike Ziese, Diego Krapf, Philip E. Batson, H. Dekker Nynke, Cees Dekker, Henny W. Zandbergen

Research output: Contribution to journal › Article › peer-review

68 Scopus citations

Abstract

Solid-state nanopores fabricated by a high-intensity electron beam in ceramic membranes can be fine-tuned on three-dimensional geometry and composition by choice of materials and beam sculpting conditions. For similar beam conditions, 8 nm diameter nanopores fabricated in membranes containing SiO ₂ show large depletion areas (70 nm in radius) with small sidewall angles (55°), whereas those made in SiN membranes show small depletion areas (40 nm) with larger sidewall angles (75°). Three-dimensional electron tomograms of nanopores fabricated in a SiO ₂/SiN/SiO ₂ membrane show a biconical shape with symmetric top and bottom and indicate a mixing of SiN and SiO ₂ layers up to 30 nm from the edge of nanopore, with Si-rich particles throughout the membrane. Electron-energy-loss spectroscopy (EELS) reveals that the oxygen/ nitrogen ratio near the pore depends on the beam sculpting conditions.

Original language	English (US)
Pages (from-to)	479-484
Number of pages	6
Journal	Nano Letters
Volume	9
Issue number	1
DOIs	https://doi.org/10.1021/nl803613s
State	Published - Jan 2009
Externally published	Yes

All Science Journal Classification (ASJC) codes

Bioengineering
Chemistry(all)
Materials Science(all)
Condensed Matter Physics
Mechanical Engineering

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10.1021/nl803613s

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title = "Control of shape and material composition of solid-state nanopores",

abstract = "Solid-state nanopores fabricated by a high-intensity electron beam in ceramic membranes can be fine-tuned on three-dimensional geometry and composition by choice of materials and beam sculpting conditions. For similar beam conditions, 8 nm diameter nanopores fabricated in membranes containing SiO 2 show large depletion areas (70 nm in radius) with small sidewall angles (55°), whereas those made in SiN membranes show small depletion areas (40 nm) with larger sidewall angles (75°). Three-dimensional electron tomograms of nanopores fabricated in a SiO 2/SiN/SiO 2 membrane show a biconical shape with symmetric top and bottom and indicate a mixing of SiN and SiO 2 layers up to 30 nm from the edge of nanopore, with Si-rich particles throughout the membrane. Electron-energy-loss spectroscopy (EELS) reveals that the oxygen/ nitrogen ratio near the pore depends on the beam sculpting conditions.",

author = "Wu, {Meng Yue} and Smeets, {Ralph M.M.} and Mathijs Zandbergen and Ulrike Ziese and Diego Krapf and Batson, {Philip E.} and Nynke, {H. Dekker} and Cees Dekker and Zandbergen, {Henny W.}",

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AU - Wu, Meng Yue

AU - Smeets, Ralph M.M.

AU - Zandbergen, Mathijs

AU - Ziese, Ulrike

AU - Krapf, Diego

AU - Batson, Philip E.

AU - Nynke, H. Dekker

AU - Dekker, Cees

AU - Zandbergen, Henny W.

PY - 2009/1

Y1 - 2009/1

N2 - Solid-state nanopores fabricated by a high-intensity electron beam in ceramic membranes can be fine-tuned on three-dimensional geometry and composition by choice of materials and beam sculpting conditions. For similar beam conditions, 8 nm diameter nanopores fabricated in membranes containing SiO 2 show large depletion areas (70 nm in radius) with small sidewall angles (55°), whereas those made in SiN membranes show small depletion areas (40 nm) with larger sidewall angles (75°). Three-dimensional electron tomograms of nanopores fabricated in a SiO 2/SiN/SiO 2 membrane show a biconical shape with symmetric top and bottom and indicate a mixing of SiN and SiO 2 layers up to 30 nm from the edge of nanopore, with Si-rich particles throughout the membrane. Electron-energy-loss spectroscopy (EELS) reveals that the oxygen/ nitrogen ratio near the pore depends on the beam sculpting conditions.

AB - Solid-state nanopores fabricated by a high-intensity electron beam in ceramic membranes can be fine-tuned on three-dimensional geometry and composition by choice of materials and beam sculpting conditions. For similar beam conditions, 8 nm diameter nanopores fabricated in membranes containing SiO 2 show large depletion areas (70 nm in radius) with small sidewall angles (55°), whereas those made in SiN membranes show small depletion areas (40 nm) with larger sidewall angles (75°). Three-dimensional electron tomograms of nanopores fabricated in a SiO 2/SiN/SiO 2 membrane show a biconical shape with symmetric top and bottom and indicate a mixing of SiN and SiO 2 layers up to 30 nm from the edge of nanopore, with Si-rich particles throughout the membrane. Electron-energy-loss spectroscopy (EELS) reveals that the oxygen/ nitrogen ratio near the pore depends on the beam sculpting conditions.

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Control of shape and material composition of solid-state nanopores

Abstract

All Science Journal Classification (ASJC) codes

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