Control of shape and material composition of solid-state nanopores

Meng Yue Wu, Ralph M.M. Smeets, Mathijs Zandbergen, Ulrike Ziese, Diego Krapf, Philip E. Batson, H. Dekker Nynke, Cees Dekker, Henny W. Zandbergen

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68 Scopus citations


Solid-state nanopores fabricated by a high-intensity electron beam in ceramic membranes can be fine-tuned on three-dimensional geometry and composition by choice of materials and beam sculpting conditions. For similar beam conditions, 8 nm diameter nanopores fabricated in membranes containing SiO 2 show large depletion areas (70 nm in radius) with small sidewall angles (55°), whereas those made in SiN membranes show small depletion areas (40 nm) with larger sidewall angles (75°). Three-dimensional electron tomograms of nanopores fabricated in a SiO 2/SiN/SiO 2 membrane show a biconical shape with symmetric top and bottom and indicate a mixing of SiN and SiO 2 layers up to 30 nm from the edge of nanopore, with Si-rich particles throughout the membrane. Electron-energy-loss spectroscopy (EELS) reveals that the oxygen/ nitrogen ratio near the pore depends on the beam sculpting conditions.

Original languageEnglish (US)
Pages (from-to)479-484
Number of pages6
JournalNano Letters
Issue number1
StatePublished - Jan 2009
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering


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