Abstract
4H-SiC visible blind avalanche photodiode (APD) linear arrays have been fabricated and successfully tested. A 40 pixel linear array with only one bad pixel has been demonstrated. The linear arrays show uniform breakdown voltage and low leakage current. The photoresponse and the excess noise factor of 4H-SiC APD pixels have been studied. A very high multiplication gain with very low excess noise factors is reported.
Original language | English (US) |
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Pages (from-to) | 241-245 |
Number of pages | 5 |
Journal | Solid-State Electronics |
Volume | 47 |
Issue number | 2 |
DOIs | |
State | Published - Feb 2003 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry
Keywords
- 4H-SiC
- Avalanche breakdown
- Avalanche photodiodes
- Excess noise factor
- Linear arrays
- Visible blind UV detectors