Design and control of optimal scan trajectories: Scanning tunneling microscope example

Hector Perez, Qingze Zou, Santosh Devasia

Research output: Contribution to journalArticlepeer-review

35 Scopus citations

Abstract

This article addresses the optimal (minimal input energy) design of scan trajectories, which is important in applications such as the imaging and manipulation of nano-scale surface phenomena using scanning tunneling microscopes (STM), MEMS-based microscanners, quick-return mechanisms and cams used in manufacturing, and general repeating processes. The contribution of this article is the systematic solution of the optimal scan-trajectory design problem. As opposed to existing techniques that require prespecification of the desired output trajectory (such prespecifications can be ad hoc), the optimal output trajectory is found as a result of the proposed input-energy minimization approach. In this sense, the proposed approach leads to a systematic solution of the optimal output-trajectory-design problem. The proposed optimal scanning method is applied to an experimental scanning tunneling microscope; simulation and experimental results are presented to illustrate the efficacy of the proposed approach to design optimal scan-trajectories.

Original languageEnglish (US)
Pages (from-to)187-197
Number of pages11
JournalJournal of Dynamic Systems, Measurement and Control, Transactions of the ASME
Volume126
Issue number1
DOIs
StatePublished - 2004
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Information Systems
  • Instrumentation
  • Mechanical Engineering
  • Computer Science Applications

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