Abstract
The exponentially weighted moving average (EWMA) is a well-knownand popular statistic used for smoothing and forecasting time series and as a process mean estimator, due to its simplicity and ability to capturenonstationarity. The EWMA statistic has been shown to be an optimal mean estimator for a certain disturbance process and an effective estimator for various other processes. In this article we focus on a practical disturbance process—relatively small random step changes that are difficult to distinguish from white noise and usually overlooked by practitioners. We propose an optimal EWMA parameter for step-change disturbance processes, as well as methodologies to identify and estimate the process models. The EWMA estimator's performance is then evaluated analytically. We demonstrate that a well-designed EWMA control scheme can effectively reduce the process variation even for processes subject to infrequent, small step changes. A semiconductor process example illustrates the design and analysis.
Original language | English (US) |
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Pages (from-to) | 379-389 |
Number of pages | 11 |
Journal | Technometrics |
Volume | 44 |
Issue number | 4 |
DOIs | |
State | Published - Nov 2002 |
All Science Journal Classification (ASJC) codes
- Statistics and Probability
- Modeling and Simulation
- Applied Mathematics
Keywords
- Exponentially weighted moving average
- Mean estimator
- Run-to-run control
- Step change