@inproceedings{a6d4e7583e474eafa17aab9fcc2892d7,
title = "Design of a PMN-PT-based monolithic nanomanipulator",
abstract = "In this paper, a cantilever-based manipulator using (1-X)Pb(Mg 1/3Nb2/3)O3-XPbTiO3 (PMN-PT) single-crystal relaxor ferroelectric material is presented. We report the design of a novel piezoelectric multi-degree-of-freedom motion cantilever. The structure has interdigitated electrode (IDE) on the top and bottom surfaces of the cantilever and possesses both longitudinal and flexural actuation capabilities. PMN-PT materials are ideal for actuator applications since they exhibit a very high piezoelectric strain. We separately partern interdigitated electrode (IDE) on the top and bottom surfaces of a single crystal cantilever beam. Furthermore, we propose a novel L-shaped cantilever manipulator that can provide up to four-degrees of freedom motion. The small and planar structure has potential applications in optical beam steering systems and nano-manipulators inside a scanning electron microscope.",
keywords = "Interdigitated electrode (IDE), Nano-manipulator, Nanorobotics, PMN-PT",
author = "Moon, {Kee S.} and Jingang Yi and Hong, {Yong K.} and Mathers, {J. A.L.}",
note = "Funding Information: Acknowledgements. We express our thanks to Jos{\'e} Pedro Calvo Sorando (IGME), Idoia Rosales (IGME), Mar{\'i}a Najarro (IGME), Francisco Javier L{\'o}pez Marcano (Consejer{\'i}a de Cultura, Turismo y Deportes, Gobierno de Cantabria) and Fermin Unz{\'u}e (El Soplao Cave) for the efforts and promotion of the study of the new Spanish outcropt. One of the coauthors (E.P.) benefits from a {\textquoteleft}Ram{\'o}n y Cajal{\textquoteright} contract of the Spanish Ministry of Science and Innovation. This research received support from the {\textquoteleft}SYNTHESYS Project http://www.synthesys.info/, code FR-TAF-5126{\textquoteright}, which is financed by European Community Research Infrastructure Action under the FP6 {\textquoteleft}Structuring the European Research Area{\textquoteright} Programme. In addition, this study is framed in the project CGL2008-00550/BTE: {\textquoteleft}Amber of the Cretaceous of Spain: A multidisciplinary study{\textquoteright} and the IGME project 491-CANOA 35015 {\textquoteleft}Investigaci{\'o}n cient{\'i}fica y t{\'e}cnica de la Cueva de El Soplao y su entorno geol{\'o}gico{\textquoteright}. We thank Pr. L. Mound for helpful comments on the first version of the manuscript.; Optomechatronic Actuators and Manipulation III ; Conference date: 08-10-2007 Through 10-10-2007",
year = "2007",
doi = "10.1117/12.754373",
language = "English (US)",
isbn = "9780819468635",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Optomechatronic Actuators and Manipulation III",
}