Design of a PMN-PT-based monolithic nanomanipulator

Kee S. Moon, Jingang Yi, Yong K. Hong, J. A.L. Mathers

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


In this paper, a cantilever-based manipulator using (1-X)Pb(Mg 1/3Nb2/3)O3-XPbTiO3 (PMN-PT) single-crystal relaxor ferroelectric material is presented. We report the design of a novel piezoelectric multi-degree-of-freedom motion cantilever. The structure has interdigitated electrode (IDE) on the top and bottom surfaces of the cantilever and possesses both longitudinal and flexural actuation capabilities. PMN-PT materials are ideal for actuator applications since they exhibit a very high piezoelectric strain. We separately partern interdigitated electrode (IDE) on the top and bottom surfaces of a single crystal cantilever beam. Furthermore, we propose a novel L-shaped cantilever manipulator that can provide up to four-degrees of freedom motion. The small and planar structure has potential applications in optical beam steering systems and nano-manipulators inside a scanning electron microscope.

Original languageEnglish (US)
Title of host publicationOptomechatronic Actuators and Manipulation III
StatePublished - 2007
Externally publishedYes
EventOptomechatronic Actuators and Manipulation III - Lausanne, Switzerland
Duration: Oct 8 2007Oct 10 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherOptomechatronic Actuators and Manipulation III

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


  • Interdigitated electrode (IDE)
  • Nano-manipulator
  • Nanorobotics
  • PMN-PT


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