DIFFUSION OF ARSENIC AND PHOSPHORUS IN LASER-PROCESSED-POLYCRYSTALLINE-SILICON-THIN-FILMS.

H. Baumgart, H. J. Leamy, L. E. Trimble, C. J. Doherty, G. K. Celler

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations
Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposia Proceedings
PublisherElsevier Science Publ Co
Pages311-316
Number of pages6
ISBN (Print)0444006974
StatePublished - 1982
Externally publishedYes

Publication series

NameMaterials Research Society Symposia Proceedings
Volume5
ISSN (Print)0272-9172

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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