Direct-write thermocapillary dewetting of polymer thin films by a laser-induced thermal gradient

Jonathan P. Singer, Pao Tai Lin, Steven E. Kooi, Lionel C. Kimerling, Jurgen Michel, Edwin L. Thomas

Research output: Contribution to journalArticlepeer-review

36 Scopus citations

Abstract

The demand for lithographic methods that provide rapid, high resolution patterning with a maximum degree of control continues apace. By taking advantage of the interaction between optical and thermal effects, one has developed a positive-tone DW technique that can achieve sub-wavelength pattering by non-linear overlap effects in a conventional polymer system with relatively inexpensive free-space optics, where the resulting features are robust enough for transfer to the underlying substrate. An analogous phenomenon has been recently used to increase the feature resolution and pitch of nanotip indentation fabricated gratings by exploiting the overlap of the material displaced by formation of a trench. While there are highly dynamic processes involved in material's displacement by FLaSk, further FEM simulation can elucidate some of these behaviors.

Original languageEnglish (US)
Pages (from-to)6100-6105
Number of pages6
JournalAdvanced Materials
Volume25
Issue number42
DOIs
StatePublished - Nov 13 2013
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Keywords

  • dewetting
  • direct write
  • pattern transfer
  • thermocapillary effect

Fingerprint Dive into the research topics of 'Direct-write thermocapillary dewetting of polymer thin films by a laser-induced thermal gradient'. Together they form a unique fingerprint.

Cite this