Effect of Electrode Configurations on the Q-Factor and Spurious Modes for a Doubly Rotated Contoured Quartz Resonator

Mihir S. Patel, Bikash K. Sinha, Y. K. Yong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

One of the important parameters that contribute to the quartz pressure sensor excellent stability at high temperature and pressure is the high material Q-factor of crystalline quartz. The next generation dual-mode SBTC-cut quartz-based pressure sensor was recently developed to target a higher-pressure range of 210 MPa psi and temperatures up to 200 °C. The objective of this paper was to modify electrode thickness and shape to maximize the resonator Q of the B-mode after sealing and increase the frequency separation of the unwanted anharmonic overtones to avoid activity dips over the operating pressure and temperature ranges. This paper describes a method for calculating the Q-factor, investigate different electrode design configurations and provide recommendations to improve the B-mode Q-factor value.

Original languageEnglish (US)
Title of host publication2018 IEEE International Ultrasonics Symposium, IUS 2018
PublisherIEEE Computer Society
ISBN (Electronic)9781538634257
DOIs
StatePublished - Dec 17 2018
Event2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan
Duration: Oct 22 2018Oct 25 2018

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2018-October
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2018 IEEE International Ultrasonics Symposium, IUS 2018
Country/TerritoryJapan
CityKobe
Period10/22/1810/25/18

All Science Journal Classification (ASJC) codes

  • Acoustics and Ultrasonics

Keywords

  • Q-factor
  • dual-mode
  • electrode configurations and spurious modes
  • pressure sensors
  • thickness-shear mode

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