Effect of Lateral Electrode Size on Suppressing Spurious Modes in ZnO Thin Film Resonators

Zinan Zhao, Zhenghua Qian, Yook Kong Yong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Forced mode coupling vibration of ZnO thin film resonator with its c-axis along thickness direction operating at thickness-extensional mode is studied in this paper. The zone dispersion curve is obtained since the mechanical damping of ZnO thin film is considered in this case. The displacement solutions are constructed based on the zone dispersion curve and the Mason model solution, which are then substituted into weak boundary conditions at the left and right edges determining the undetermined constants. The effect of lateral electrode size on suppressing spurious modes is particularly studied. The results show that with lateral electrode size increasing, more spurious modes occurs in the band between fs and fp but their amplitude strength become weaker. Therefore, in realistic resonators a larger lateral boundary is more desirable and then the band between fs and fp would become smoother.

Original languageEnglish (US)
Title of host publicationIFCS/EFTF 2019 - Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538683057
DOIs
StatePublished - Apr 2019
Event2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, IFCS/EFTF 2019 - Orlando, United States
Duration: Apr 14 2019Apr 18 2019

Publication series

NameIFCS/EFTF 2019 - Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, Proceedings

Conference

Conference2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, IFCS/EFTF 2019
Country/TerritoryUnited States
CityOrlando
Period4/14/194/18/19

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Computer Networks and Communications
  • Instrumentation

Keywords

  • dispersion curve
  • forced vibration
  • spurious mode
  • weak boundary condition

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