Effects of reactive ion etching on chemical vapor deposition

C. Y. Wong, P. E. Batson

Research output: Contribution to journalArticlepeer-review


Silicon surfaces were exposed to reactive ion etching with CCl 2F2, followed by low pressure chemical vapor deposition of silicon nitride. Examination with transmission electron microscopy shows a 5-nm homogeneous layer with interfacial roughness about the order of the layer thickness between the nitride and the silicon substrate. Analysis with spatially resolved electron energy loss scattering indicates that this phase is Si 2N2O. The causes for the formation of this layer and its implication on very large scale integration technology are discussed.

Original languageEnglish (US)
Pages (from-to)253-255
Number of pages3
JournalApplied Physics Letters
Issue number5
StatePublished - 1987
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)


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