Electronic structure in confined volumes using spatially resolved electron energy loss scattering

Research output: Contribution to journalArticle

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Abstract

The instrumental requirements, spectral processing and interpretation for spatially resolved electron energy loss scattering appropriate for electronic structure determinations are reviewed. As an example, the recent Si L2, 3 absorption spectra obtained with 0.2 eV resolution in GeSi alloy layers 5-50 nm thick are discussed.

Original languageEnglish (US)
Pages (from-to)297-303
Number of pages7
JournalMaterials Science and Engineering B
Volume14
Issue number3
DOIs
StatePublished - Aug 15 1992
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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