An energy-resolved study of Si+ desorption from Si(1 0 0) under the irradiation of low fluence 193 nm pulsed laser beam is made using high resolution mass-selected time-of-flight (TOF) technique. New features in the kinetic energy distribution of desorbed Si ions have been observed. A simple DIET model is found to provide a reasonably good understanding for the main features in the TOF spectra.
All Science Journal Classification (ASJC) codes
- Nuclear and High Energy Physics