Energy-resolved study of laser-stimulated Si+ desorption from Si(1 0 0)

H. T. Liu, Z. Wu

Research output: Contribution to journalArticlepeer-review

Abstract

An energy-resolved study of Si+ desorption from Si(1 0 0) under the irradiation of low fluence 193 nm pulsed laser beam is made using high resolution mass-selected time-of-flight (TOF) technique. New features in the kinetic energy distribution of desorbed Si ions have been observed. A simple DIET model is found to provide a reasonably good understanding for the main features in the TOF spectra.

Original languageEnglish (US)
Pages (from-to)103-107
Number of pages5
JournalNuclear Inst. and Methods in Physics Research, B
Volume101
Issue number1-2
DOIs
StatePublished - Jun 3 1995

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Instrumentation

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