Evaluation of a laser-based proximity x-ray stepper

G. K. Celler, J. Frackoviak, R. R. Freeman, C. W. Jurgensen, R. R. Kola, A. E. Novembre, L. F. Thompson, L. E. Trimble, D. N. Tomes

Research output: Contribution to journalConference article

3 Scopus citations

Abstract

Preliminary evaluation of a 1:1 proximity x-ray stepper, built by Hampshire Instruments is discussed here. This stepper, model 5000P, is the first commercial system that uses a laser-generated plasma x-ray source. It was extensively tested at the supplier's facility and in July 1991 it was shipped to AT&T Bell Labs, where its installation is nearly completed.

Original languageEnglish (US)
Pages (from-to)312-316
Number of pages5
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume1671
DOIs
StatePublished - Jul 9 1992
Externally publishedYes
EventElectron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II 1992 - San Jose, United States
Duration: Mar 8 1992Mar 12 1992

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Celler, G. K., Frackoviak, J., Freeman, R. R., Jurgensen, C. W., Kola, R. R., Novembre, A. E., Thompson, L. F., Trimble, L. E., & Tomes, D. N. (1992). Evaluation of a laser-based proximity x-ray stepper. Proceedings of SPIE - The International Society for Optical Engineering, 1671, 312-316. https://doi.org/10.1117/12.136015