Evolution of surface relief during firing of pzt thin films

Emil A. Kneer, Dunbar P. Birnie, G. Teowee, J. C. Podlesny

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

A controlled test of platinum bottom electrode preparation has been performed. Different types of Ti or TiOx layers have been used to promote adhesion of the platinum electrode. This paper correlates the surface roughness of these electrodes with electrical properties that result.

Original languageEnglish (US)
Pages (from-to)67-72
Number of pages6
JournalFerroelectrics
Volume152
Issue number1
DOIs
StatePublished - Feb 1994

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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