Evolution of surface relief during firing of pzt thin films

Emil A. Kneer; Dunbar P. Birnie; G. Teowee; J. C. Podlesny

doi:10.1080/00150199408017598

Evolution of surface relief during firing of pzt thin films

Emil A. Kneer, Dunbar P. Birnie, G. Teowee, J. C. Podlesny

School of Engineering, Materials Science & Engineering

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

A controlled test of platinum bottom electrode preparation has been performed. Different types of Ti or TiOx layers have been used to promote adhesion of the platinum electrode. This paper correlates the surface roughness of these electrodes with electrical properties that result.

Original language	English (US)
Pages (from-to)	67-72
Number of pages	6
Journal	Ferroelectrics
Volume	152
Issue number	1
DOIs	https://doi.org/10.1080/00150199408017598
State	Published - Feb 1994

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics

Access to Document

10.1080/00150199408017598

Cite this

@article{cdccde64fc3a4314971cdb1228499a67,

title = "Evolution of surface relief during firing of pzt thin films",

abstract = "A controlled test of platinum bottom electrode preparation has been performed. Different types of Ti or TiOx layers have been used to promote adhesion of the platinum electrode. This paper correlates the surface roughness of these electrodes with electrical properties that result.",

author = "Kneer, {Emil A.} and Birnie, {Dunbar P.} and G. Teowee and Podlesny, {J. C.}",

year = "1994",

month = feb,

doi = "10.1080/00150199408017598",

language = "English (US)",

volume = "152",

pages = "67--72",

journal = "Ferroelectrics",

issn = "0015-0193",

publisher = "Taylor and Francis Ltd.",

number = "1",

}

TY - JOUR

T1 - Evolution of surface relief during firing of pzt thin films

AU - Kneer, Emil A.

AU - Birnie, Dunbar P.

AU - Teowee, G.

AU - Podlesny, J. C.

PY - 1994/2

Y1 - 1994/2

N2 - A controlled test of platinum bottom electrode preparation has been performed. Different types of Ti or TiOx layers have been used to promote adhesion of the platinum electrode. This paper correlates the surface roughness of these electrodes with electrical properties that result.

AB - A controlled test of platinum bottom electrode preparation has been performed. Different types of Ti or TiOx layers have been used to promote adhesion of the platinum electrode. This paper correlates the surface roughness of these electrodes with electrical properties that result.

UR - http://www.scopus.com/inward/record.url?scp=0027986261&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0027986261&partnerID=8YFLogxK

U2 - 10.1080/00150199408017598

DO - 10.1080/00150199408017598

M3 - Article

AN - SCOPUS:0027986261

VL - 152

SP - 67

EP - 72

JO - Ferroelectrics

JF - Ferroelectrics

SN - 0015-0193

IS - 1

ER -

Evolution of surface relief during firing of pzt thin films

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this