Excimer formation using low energy electron beam excitation

Andreas Ulrich; Jochen Wieser; Daniel Murnick

doi:10.1117/12.311957

Excimer formation using low energy electron beam excitation

Andreas Ulrich, Jochen Wieser, Daniel Murnick

Research output: Contribution to journal › Conference article › peer-review

5 Scopus citations

Abstract

Excimer formation in dense gas targets is studied using a 10 to 20 keV electron beam for the excitation of rare gases. A SiN_x ceramic foil, only 300 nm thick but strong and completely vacuum tight is used as an entrance window. The electrons loose only 4 to 6% of their energy in this foil. The low electron energy allows a table top setup without high voltage or x-ray radiation hazards. First applications of the system for excimer physics research and the development of novel vacuum ultraviolet light sources are described.

Original language	English (US)
Pages (from-to)	300-307
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3403
DOIs	https://doi.org/10.1117/12.311957
State	Published - Dec 1 1997
Externally published	Yes
Event	International Conference on Atomic and Molecular Pulsed Lasers II - Tomsk, Russian Federation Duration: Sep 22 1997 → Sep 26 1997

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering
Condensed Matter Physics

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10.1117/12.311957

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title = "Excimer formation using low energy electron beam excitation",

abstract = "Excimer formation in dense gas targets is studied using a 10 to 20 keV electron beam for the excitation of rare gases. A SiNx ceramic foil, only 300 nm thick but strong and completely vacuum tight is used as an entrance window. The electrons loose only 4 to 6% of their energy in this foil. The low electron energy allows a table top setup without high voltage or x-ray radiation hazards. First applications of the system for excimer physics research and the development of novel vacuum ultraviolet light sources are described.",

author = "Andreas Ulrich and Jochen Wieser and Daniel Murnick",

year = "1997",

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doi = "10.1117/12.311957",

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journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "International Conference on Atomic and Molecular Pulsed Lasers II ; Conference date: 22-09-1997 Through 26-09-1997",

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TY - JOUR

T1 - Excimer formation using low energy electron beam excitation

AU - Ulrich, Andreas

AU - Wieser, Jochen

AU - Murnick, Daniel

PY - 1997/12/1

Y1 - 1997/12/1

N2 - Excimer formation in dense gas targets is studied using a 10 to 20 keV electron beam for the excitation of rare gases. A SiNx ceramic foil, only 300 nm thick but strong and completely vacuum tight is used as an entrance window. The electrons loose only 4 to 6% of their energy in this foil. The low electron energy allows a table top setup without high voltage or x-ray radiation hazards. First applications of the system for excimer physics research and the development of novel vacuum ultraviolet light sources are described.

AB - Excimer formation in dense gas targets is studied using a 10 to 20 keV electron beam for the excitation of rare gases. A SiNx ceramic foil, only 300 nm thick but strong and completely vacuum tight is used as an entrance window. The electrons loose only 4 to 6% of their energy in this foil. The low electron energy allows a table top setup without high voltage or x-ray radiation hazards. First applications of the system for excimer physics research and the development of novel vacuum ultraviolet light sources are described.

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U2 - 10.1117/12.311957

DO - 10.1117/12.311957

M3 - Conference article

AN - SCOPUS:0031390391

VL - 3403

SP - 300

EP - 307

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

T2 - International Conference on Atomic and Molecular Pulsed Lasers II

Y2 - 22 September 1997 through 26 September 1997

ER -