Abstract
Excimer formation in dense gas targets is studied using a 10 to 20 keV electron beam for the excitation of rare gases. A SiNx ceramic foil, only 300 nm thick but strong and completely vacuum tight is used as an entrance window. The electrons loose only 4 to 6% of their energy in this foil. The low electron energy allows a table top setup without high voltage or x-ray radiation hazards. First applications of the system for excimer physics research and the development of novel vacuum ultraviolet light sources are described.
Original language | English (US) |
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Pages (from-to) | 300-307 |
Number of pages | 8 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 3403 |
DOIs | |
State | Published - Dec 1 1997 |
Externally published | Yes |
Event | International Conference on Atomic and Molecular Pulsed Lasers II - Tomsk, Russian Federation Duration: Sep 22 1997 → Sep 26 1997 |
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
- Condensed Matter Physics