Excimer formation using low energy electron beam excitation

Andreas Ulrich; Jochen Wieser; Daniel E. Murnick

doi:10.1117/12.311957

Excimer formation using low energy electron beam excitation

Andreas Ulrich, Jochen Wieser, Daniel E. Murnick

Research output: Contribution to journal › Conference article › peer-review

6 Scopus citations

Abstract

Excimer formation in dense gas targets is studied using a 10 to 20 keV electron beam for the excitation of rare gases. A SiN_x ceramic foil, only 300 nm thick but strong and completely vacuum tight is used as an entrance window. The electrons loose only 4 to 6% of their energy in this foil. The low electron energy allows a table top setup without high voltage or x-ray radiation hazards. First applications of the system for excimer physics research and the development of novel vacuum ultraviolet light sources are described.

Original language	English (US)
Pages (from-to)	300-307
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3403
DOIs	https://doi.org/10.1117/12.311957
State	Published - 1997
Externally published	Yes
Event	International Conference on Atomic and Molecular Pulsed Lasers II - Tomsk, Russian Federation Duration: Sep 22 1997 → Sep 26 1997

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Keywords

Ceramic foils
Electron beam excitation
Rare gas excimers
Silicon nitride
VUV light source

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10.1117/12.311957

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title = "Excimer formation using low energy electron beam excitation",

abstract = "Excimer formation in dense gas targets is studied using a 10 to 20 keV electron beam for the excitation of rare gases. A SiNx ceramic foil, only 300 nm thick but strong and completely vacuum tight is used as an entrance window. The electrons loose only 4 to 6% of their energy in this foil. The low electron energy allows a table top setup without high voltage or x-ray radiation hazards. First applications of the system for excimer physics research and the development of novel vacuum ultraviolet light sources are described.",

keywords = "Ceramic foils, Electron beam excitation, Rare gas excimers, Silicon nitride, VUV light source",

author = "Andreas Ulrich and Jochen Wieser and Murnick, {Daniel E.}",

year = "1997",

doi = "10.1117/12.311957",

language = "English (US)",

volume = "3403",

pages = "300--307",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "International Conference on Atomic and Molecular Pulsed Lasers II ; Conference date: 22-09-1997 Through 26-09-1997",

}

TY - JOUR

T1 - Excimer formation using low energy electron beam excitation

AU - Ulrich, Andreas

AU - Wieser, Jochen

AU - Murnick, Daniel E.

PY - 1997

Y1 - 1997

N2 - Excimer formation in dense gas targets is studied using a 10 to 20 keV electron beam for the excitation of rare gases. A SiNx ceramic foil, only 300 nm thick but strong and completely vacuum tight is used as an entrance window. The electrons loose only 4 to 6% of their energy in this foil. The low electron energy allows a table top setup without high voltage or x-ray radiation hazards. First applications of the system for excimer physics research and the development of novel vacuum ultraviolet light sources are described.

AB - Excimer formation in dense gas targets is studied using a 10 to 20 keV electron beam for the excitation of rare gases. A SiNx ceramic foil, only 300 nm thick but strong and completely vacuum tight is used as an entrance window. The electrons loose only 4 to 6% of their energy in this foil. The low electron energy allows a table top setup without high voltage or x-ray radiation hazards. First applications of the system for excimer physics research and the development of novel vacuum ultraviolet light sources are described.

KW - Ceramic foils

KW - Electron beam excitation

KW - Rare gas excimers

KW - Silicon nitride

KW - VUV light source

UR - http://www.scopus.com/inward/record.url?scp=0031390391&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031390391&partnerID=8YFLogxK

U2 - 10.1117/12.311957

DO - 10.1117/12.311957

M3 - Conference article

AN - SCOPUS:0031390391

VL - 3403

SP - 300

EP - 307

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

T2 - International Conference on Atomic and Molecular Pulsed Lasers II

Y2 - 22 September 1997 through 26 September 1997

ER -

Excimer formation using low energy electron beam excitation

Abstract

All Science Journal Classification (ASJC) codes

Keywords

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