Excimer formation using low energy electron beam excitation

Andreas Ulrich, Jochen Wieser, Daniel E. Murnick

Research output: Contribution to journalConference articlepeer-review

6 Scopus citations


Excimer formation in dense gas targets is studied using a 10 to 20 keV electron beam for the excitation of rare gases. A SiNx ceramic foil, only 300 nm thick but strong and completely vacuum tight is used as an entrance window. The electrons loose only 4 to 6% of their energy in this foil. The low electron energy allows a table top setup without high voltage or x-ray radiation hazards. First applications of the system for excimer physics research and the development of novel vacuum ultraviolet light sources are described.

Original languageEnglish (US)
Pages (from-to)300-307
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 1997
Externally publishedYes
EventInternational Conference on Atomic and Molecular Pulsed Lasers II - Tomsk, Russian Federation
Duration: Sep 22 1997Sep 26 1997

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


  • Ceramic foils
  • Electron beam excitation
  • Rare gas excimers
  • Silicon nitride
  • VUV light source


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