Experimental and numerical study of conjugate heat transfer in a horizontal channel heated from below: applications to CVD processing

Wilson K.S. Chiu, Cristy J. Richards, Yogesh Jaluria

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

A detailed experimental and numerical study is carried out to investigate conjugate heat transfer in a horizontal channel with a heated section which simulates Chemical Vapor Deposition (CVD) processing. Since film quality, uniformity and deposition rate have strong dependence on temperature, the role of conjugate heat transfer in influencing temperature distribution is significant in thin film production. Experimental data obtained from this study provides physical insight into conjugate heat transfer effects and allows for comparison and validation of numerical conjugate heat transfer models. The basic characteristics of the flow and the thermal transport are studied. The numerical model is used to perform a parametric study of operational parameters, allowing for the characterization of conjugate heat transfer effects on temperature at the susceptor surface, reactor walls and the gas phase. The study yields valuable guidelines for the thermal design of CVD reactors.

Original languageEnglish (US)
Title of host publicationAmerican Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD
PublisherASME
Pages131-142
Number of pages12
ISBN (Print)0791816567
Publication statusPublished - Dec 1 1999
EventHeat Transfer Division - 1999 ((The ASME International Mechanical Engineering Congress and Exposition) - Nashville, TN, USA
Duration: Nov 14 1999Nov 19 1999

Publication series

NameAmerican Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD
Volume364-3
ISSN (Print)0272-5673

Other

OtherHeat Transfer Division - 1999 ((The ASME International Mechanical Engineering Congress and Exposition)
CityNashville, TN, USA
Period11/14/9911/19/99

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All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Fluid Flow and Transfer Processes

Cite this

Chiu, W. K. S., Richards, C. J., & Jaluria, Y. (1999). Experimental and numerical study of conjugate heat transfer in a horizontal channel heated from below: applications to CVD processing. In American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD (pp. 131-142). (American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD; Vol. 364-3). ASME.