Experimental study of ALD HfO2 deposited on strained Silicon-on-insulator (sSOI & xsSOI) and SOI

D. Gu, K. Tapily, P. Shrestha, G. Celler, H. Baumgart

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Fingerprint

Dive into the research topics of 'Experimental study of ALD HfO2 deposited on strained Silicon-on-insulator (sSOI & xsSOI) and SOI'. Together they form a unique fingerprint.

Keyphrases

Material Science

Engineering