Fabrication and study of ZnO photoconductive UV detector

Shi Wei Feng, Ying Li, Jing Ying Sun, Xue Song Xie, Ji Yang, Yue Zong Zhang, Yi Cheng Lu

Research output: Contribution to journalArticlepeer-review

Abstract

A ZnO photoconductive UV detector is fabricated on ZnO film grown by MOCVD based on Al/Au interdigital electrode. Nonalloyed Al/Au metallization scheme forms good ohmic contact on n-type ZnO. The dark and photoilluminated currents increase linearly with bias voltage. The cutoff wavelength of the detector is 368 nm, and it is also in response to the blue and green light. XPS analysis shows that there are oxygen vacancy and zinc interstitial in the ZnO film, and the nonstoichiometric ZnO film has influence on the photoresponse time of the detector.

Original languageEnglish (US)
Pages (from-to)678-681
Number of pages4
JournalBeijing Gongye Daxue Xuebao / Journal of Beijing University of Technology
Volume33
Issue number7
StatePublished - Jul 2007

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Keywords

  • Thin films
  • Ultraviolet detectors
  • Zinc oxide

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