Feedforward Control of Piezoactuators in Atomic Force Microscope Systems: Inversion-based compensation for dynamics and hysteresis

Kam K. Leang, Qingze Zou, Santosh Devasia

Research output: Contribution to journalArticlepeer-review

258 Scopus citations
Original languageEnglish (US)
Pages (from-to)70-82
Number of pages13
JournalIEEE Control Systems
Volume29
Issue number1
DOIs
StatePublished - Feb 2009
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Modeling and Simulation
  • Electrical and Electronic Engineering

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