@article{b2854b102d1f4704945cd7805ecceeb6,
title = "Feedforward Control of Piezoactuators in Atomic Force Microscope Systems: Inversion-based compensation for dynamics and hysteresis",
author = "Leang, {Kam K.} and Qingze Zou and Santosh Devasia",
year = "2009",
month = feb,
doi = "10.1109/MCS.2008.930922",
language = "English (US)",
volume = "29",
pages = "70--82",
journal = "IEEE Control Systems",
issn = "1066-033X",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "1",
}