Fine temperature measurement and fabrication of on-chip whispering-gallery mode micro-sensors

Matthew Frenkel, Marlon Avellan, Zhixiong Guo

Research output: Contribution to conferencePaper

Abstract

Whispering-Gallery mode based optical micro-devices have been demonstrated to have extremely high sensitivity to changes in local temperature owing to their high quality factors and frequency-based measurements. In this paper, we first examine different fabrication techniques for integrating whispering-gallery mode sensors directly onto heating components to realize on-chip in-situ dynamic temperature measurements and monitoring. The merits and drawbacks of each fabrication technique are discussed. Then, the capability of the fabricated on-chip micro-sensors to perform precise real-time thermal measurements was tested, and the findings are discussed. Finally, the advantages of such on-chip sensors are established through heat transfer analysis.

Original languageEnglish (US)
DOIs
Publication statusPublished - Jan 1 2013
EventASME 2013 4th International Conference on Micro/Nanoscale Heat and Mass Transfer, MNHMT 2013 - Hong Kong, China
Duration: Dec 11 2013Dec 14 2013

Other

OtherASME 2013 4th International Conference on Micro/Nanoscale Heat and Mass Transfer, MNHMT 2013
CountryChina
CityHong Kong
Period12/11/1312/14/13

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All Science Journal Classification (ASJC) codes

  • Fluid Flow and Transfer Processes

Cite this

Frenkel, M., Avellan, M., & Guo, Z. (2013). Fine temperature measurement and fabrication of on-chip whispering-gallery mode micro-sensors. Paper presented at ASME 2013 4th International Conference on Micro/Nanoscale Heat and Mass Transfer, MNHMT 2013, Hong Kong, China. https://doi.org/10.1115/MNHMT2013-22003