An experimental study was carried out to investigate the flow structure and heat transfer in straight and converging horizontal channels with localized heated sections, and the reactor geometry's impact on chemical vapor deposition (CVD) processing. The flow field, temperature and distribution, and heat transfer rates were explored for different flow rates, heating rates and susceptor tile angles. Experimental results provide valuable insight into the physical phenomena governing fluid flow and heat transfer.
All Science Journal Classification (ASJC) codes
- Computational Mechanics
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
- Fluid Flow and Transfer Processes