Four-terminal relay design for improved body effect

Jaeseok Jeon, Rhesa Nathanael, Vincent Pott, Tsu Jae King Liu

Research output: Contribution to journalArticlepeer-review

17 Scopus citations


Previously reported electrostatically actuated four-terminal (4T) relays suffer from a relatively weak body bias effect and undesirable influence of source/drain bias voltages on gate switching voltages. In this letter, an improved 4T relay design is demonstrated to resolve these issues.

Original languageEnglish (US)
Article number5437264
Pages (from-to)515-517
Number of pages3
JournalIEEE Electron Device Letters
Issue number5
StatePublished - May 2010
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


  • Four-terminal (4T) relay
  • MEMS
  • NEMS


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