Four-terminal relay design for improved body effect

Jaeseok Jeon, Rhesa Nathanael, Vincent Pott, Tsu Jae King Liu

Research output: Contribution to journalArticle

16 Scopus citations

Abstract

Previously reported electrostatically actuated four-terminal (4T) relays suffer from a relatively weak body bias effect and undesirable influence of source/drain bias voltages on gate switching voltages. In this letter, an improved 4T relay design is demonstrated to resolve these issues.

Original languageEnglish (US)
Article number5437264
Pages (from-to)515-517
Number of pages3
JournalIEEE Electron Device Letters
Volume31
Issue number5
DOIs
Publication statusPublished - May 1 2010
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Keywords

  • Four-terminal (4T) relay
  • MEMS
  • NEMS

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