Frequency-Temperature Analysis of MEMS AT-Cut Quartz Resonators

Y. K. Yong, J. Vig, A. Ballato, R. Kubena, R. M'Closkey

Research output: Contribution to journalConference articlepeer-review

5 Scopus citations

Abstract

An analytical study of the frequency-temperature behavior of MEMS AT-cut quartz resonator structures was performed. The piezoelectric, Lagrangian equations for the frequency-temperature behavior of quartz were employed. Two types of resonator structures were studied: A 1 GHz rectangular plate with rectangular electrodes and a 1 GHz rectangular ring electrode mesa (REM) plate. For MEMS resonators, the REM design confers certain advantages in attaining higher resonant frequencies and lower electrode noise.

Original languageEnglish (US)
Pages (from-to)1095-1099
Number of pages5
JournalProceedings of the Annual IEEE International Frequency Control Symposium
StatePublished - 2003
EventProceedings of the 2003 IEEE International Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum - Tampa, FL., United States
Duration: May 4 2003May 8 2003

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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