Abstract
An analytical study of the frequency-temperature behavior of MEMS AT-cut quartz resonator structures was performed. The piezoelectric, Lagrangian equations for the frequency-temperature behavior of quartz were employed. Two types of resonator structures were studied: A 1 GHz rectangular plate with rectangular electrodes and a 1 GHz rectangular ring electrode mesa (REM) plate. For MEMS resonators, the REM design confers certain advantages in attaining higher resonant frequencies and lower electrode noise.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 1095-1099 |
| Number of pages | 5 |
| Journal | Proceedings of the Annual IEEE International Frequency Control Symposium |
| State | Published - 2003 |
| Event | Proceedings of the 2003 IEEE International Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum - Tampa, FL., United States Duration: May 4 2003 → May 8 2003 |
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Electrical and Electronic Engineering