Friction Modeling in Linear Chemical-Mechanical Planarization

Research output: Contribution to journalArticle

2 Scopus citations
Original languageEnglish (US)
Pages (from-to)59-78
Number of pages20
JournalIEEE Control Systems
Volume28
Issue number5
DOIs
StatePublished - Oct 2008

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Modeling and Simulation
  • Electrical and Electronic Engineering

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