Gate metal-induced diffusion and interface reactions in Hf oxide films on Si

  • Lyudmila V. Goncharova
  • , Mateus Dalponte
  • , Ozgur Celik
  • , Eric Garfunkel
  • , Torgny Gustafsson
  • , Pat S. Lysaght
  • , Gennadi I. Bersuker

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Scopus citations

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Material Science